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AIM-6000
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TOTAL MEASURING EQUIPMENT SYSTEM
For OLED, LCD, ITO Film, Thin Film Solar-cell
Specification
SE+SR Auto scanning module
- SE+SR Auto scanning module
- Spectral Range : 350 ~ 1000
- Acquisition speed : 1~5 sec/point
- Metrology Performance
- § Film thickness
- § Refractive index(n) and extincion coefficient(k)
- § Uniformity
3D Microscope
- Magnification : 108X ~ 17,280X
- Light Source : 405nm Laser
- Repeatability
- X,Y - 0.12nm
- Z - 10nm
- Step height measurement(3D)
- Roughness measurement
Sheet Resistance Meter
- Sheet Resistance meter
- Auto & Manual Mode
- Report (Excel)
- Repeatability : ± 0.3% of reading
- Uniformity
Option
VIS/NIR Spectrophotometer
- W.L. range : 350nm ~ 1100nm(option : 900nm ~ 1600nm)
- W.L. Resolution : 5nm
- Transmission & Reflection
XRF(Solar Cell Analysis System
- Multi Layer thickness & Content Analysis with SEM
